Precision trench capacitor

US9240406B2 · kind B2 · utility

Assignee

• GlobalFoundries Inc. · KY

Inventors

• Kai D. Feng · South Burlington, US
• Dan Moy · Bethel, US
• Chengwen Pei · Danbury, US
• Robert R. Robison · Colchester, US
• Pinping Sun · Fishkill, US
• Richard A. Wachnik · Mount Kisco, US
• Ping-Chuan Wang · Hopewell Junction, US

Key dates

• Filing date: Apr 21, 2014
• Grant date: Jan 19, 2016
• Expiry date: Apr 21, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D84/212

Abstract

A capacitor structure can include a parallel connection of a plurality of trench capacitors. First nodes of the plurality of trench capacitors are electrically tied to provide a first node of the capacitor structure. Second nodes of the plurality of trench capacitors are electrically tied together through at least one programmable electrical connection at a second node of the capacitor structure. Each programmable electrical connection can include at least one of a programmable electrical fuse and a field effect transistor, and can disconnect a corresponding trench capacitor temporarily or permanently. The total capacitance of the capacitor structure can be tuned by programming, temporarily or permanently, the at least one programmable electrical connection.