Susceptor with roll-formed surface and method for making same
US9243328B2 · kind B2 · utility
0Cited by
2References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 19, 2009 |
| Grant date | Jan 26, 2016 |
| Priority date | — |
| Expiry date | Oct 16, 2030 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4581
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention generally provides apparatus for supporting a large area substrate in a plasma reactor. One embodiment, a substrate support for using in a plasma reactor includes an electrically conductive body has a top surface with a plurality of roll-formed indents.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.