Susceptor heater and method of heating a substrate
US9299595B2 · kind B2 · utility
488Cited by
220References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 8, 2014 |
| Grant date | Mar 29, 2016 |
| Priority date | — |
| Expiry date | Dec 8, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68742
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer processing apparatus may include a susceptor having a top side and a backside, a susceptor heater having a spacing member and a heating member, a shim removably mounted between the susceptor and the susceptor heater, a cavity formed by the susceptor backside, the susceptor heater, and the shim, a fluid inlet communicating with the cavity, and a plurality of fluid outlets communicating with the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.