Patent · US Active

Method of examining a sample in a charged-particle microscope

US9312098B2 · kind B2 · utility

6Cited by
0References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 23, 2015
Grant dateApr 12, 2016
Priority date—
Expiry dateFeb 23, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/2802
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

Examining a sample in a charged-particle microscope of a scanning transmission type includes:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.