Support ring with masked edge
US9330955B2 · kind B2 · utility
5Cited by
12References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2014 |
| Grant date | May 3, 2016 |
| Priority date | — |
| Expiry date | Sep 3, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2221/683
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A support ring for semiconductor processing is provided. The support ring includes a ring shaped body defined by an inner edge and an outer edge. The inner edge and outer edge are concentric about a central axis. The ring shaped body further includes a first side, a second side, and a raised annular shoulder extending from the first side of the ring shaped body at the inner edge. The support ring also includes a coating on the first side. The coating has an inner region of reduced thickness region abutting the raised annular shoulder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.