Cluster mass flow devices and multi-line mass flow devices incorporating the same
US9335768B2 · kind B2 · utility
3Cited by
6References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 12, 2013 |
| Grant date | May 10, 2016 |
| Priority date | — |
| Expiry date | Sep 30, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/2499
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A multi-line mass flow device configured for controlled delivery of two or more fluids into a process chamber. The multi-line mass flow device comprises a cluster mass flow control manifold and a multi-inlet manifold. The cluster mass flow control manifold comprises a controller, a gas manifold mounting block, and two or more gas flow control stations. The multi-inlet manifold comprises a multi-inlet mounting block, and two or more isolation valves mounted on the multi-inlet mounting block.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.