Patent · US Active

Method for testing a test substrate under defined thermal conditions and thermally conditionable prober

US9395411B2 · kind B2 · utility

0Cited by

8References

9Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Joerg Kiesewetter · Sacka, DE
Stojan Kanev · Sacka, DE
Michael Teich · Mannheim, DE
Karsten Stoll · Wilthen, DE
Axel Schmidt · Munich, DE

Key dates

Filing date	Jul 29, 2013
Grant date	Jul 19, 2016
Priority date	—
Expiry date	Aug 5, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2874
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

In a method and a device for testing a test substrate under defined thermal conditions, a substrate that is to be tested is held by a temperature-controllable chuck and is set to a defined temperature; the test substrate is positioned relative to test probes by at least one positioning device; and the test probes make contact with the test substrate for testing purposes. At least one component of the positioning device that is present in the vicinity of the temperature-controlled test substrate is set to a temperature that is independent of the temperature of the test substrate by a temperature-controlling device, and this temperature is held constant.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.