Manufacturing a flexible structure by transfers of layers

US9427948B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Hubert Moriceau · Saint-Égrève, FR
• Maxime Argoud · Grenoble, FR
• Frank Fournel · Meylan, FR
• Frédéric Mazen · Grenoble, FR
• Christophe Morales · Le Pont-de-Claix, FR

Key dates

• Filing date: Dec 18, 2012
• Grant date: Aug 30, 2016
• Expiry date: Dec 30, 2034

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/24967
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A method for manufacturing a flexible structure including implanting ionic species in first and second source substrates so as to form first and second embrittlement regions respectively, delimiting first and second thin films, providing a flexible substrate, the stiffness R of which is less than or equal to 107 GPa·μm3, securing the first and second thin films to the first and second faces of the flexible substrate respectively so as to form a stack including the flexible structure delimited by the first and second embrittlement regions, the flexible structure having a stiffening effect suitable for allowing transfers of the first and second thin films, and applying a thermal budget so as to transfer the first and second thin films onto the flexible substrate.