Integration of a MEMS beam with optical waveguide and deflection in two dimensions
US9435952B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 10, 2013 |
| Grant date | Sep 6, 2016 |
| Priority date | — |
| Expiry date | Oct 31, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3596
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A high density, low power, high performance information system, method and apparatus are described in which an integrated circuit apparatus includes a plurality of deflectable MEMS optical beam waveguides (e.g., 190) at each die edge which are each formed with an optical beam structure (193) which is encapsulated by a waveguide beam structure (194) to extend into a deflection cavity (198) and which is surrounded by a plurality of deflection electrodes (195-197) that are positioned on walls of the deflection cavity (198) to provide two-dimensional deflection control of each deflectable MEMS optical beam waveguide in response to application of one or more deflection voltages to provide optical communications (e.g., 184) between different die.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.