Textured membrane for a multi-chamber carrier head
US9452505B2 · kind B2 · utility
1Cited by
14References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 18, 2014 |
| Grant date | Sep 27, 2016 |
| Priority date | — |
| Expiry date | Aug 18, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29L2031/755
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.