Near-infrared absorbing film compositions
US9465290B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 2, 2014 |
| Grant date | Oct 11, 2016 |
| Priority date | — |
| Expiry date | Jul 30, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/549
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A curable liquid formulation comprising: (i) one or more near-infrared absorbing polymethine dyes; (ii) one or more crosslinkable polymers; and (iii) one or more casting solvents. The invention is also directed to solid near-infrared absorbing films composed of crosslinked forms of the curable liquid formulation. The invention is also directed to a microelectronic substrate containing a coating of the solid near-infrared absorbing film as well as a method for patterning a photoresist layer coated on a microelectronic substrate in the case where the near-infrared absorbing film is between the microelectronic substrate and a photoresist film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.