Patent · US Active

Method for coating a workpiece

US9478409B2 · kind B2 · utility

0Cited by

0References

14Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Juergen Steinbrenner · Zistersdorf, AT
Markus Kahn · Rangersdorf, AT
Helmut Schoenherr · Villach, AT

Key dates

Filing date	Jan 12, 2015
Grant date	Oct 25, 2016
Priority date	—
Expiry date	Jan 12, 2035

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67034
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

In various embodiments, a method for coating a workpiece is provided. The method may include drying a workpiece, the workpiece being coated with at least one oxide layer as an uppermost layer; depositing a dielectric layer over the uppermost layer of the dried workpiece; wherein the workpiece is continuously subject to a pressure which is lower than atmospheric pressure during the drying process and during the depositing process.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.