Inventor · Rangersdorf, AT

Markus Kahn

29Patents
3h-index
43Co-inventors
59Inventor score

Filing activity: Jul 29, 2005 → May 28, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US10710874B2 Micromechanical structure and method for manufacturing the same Electricity 8 Active
US9212045B1 Micro mechanical structure and method for fabricating the same Electricity 4 Active
US8200557B2 Systems and methods for providing migration and performance matrices Physics 3 Active
US7596520B2 Systems and methods for general aggregation of characteristics and key figures Physics 3 Active
US8748297B2 Methods of forming semiconductor devices by singulating a substrate by removing a dummy fill material Electricity 3 Active
US9511560B2 Processing a sacrificial material during manufacture of a microfabricated product Emerging Cross-Sectional Technologies 3 Active
US8095442B2 Systems and methods for calculating specified matrices Physics 3 Active
US8311918B2 Systems and methods for calculating specified matrices Physics 2 Active
US9257342B2 Methods of singulating substrates to form semiconductor devices using dummy material Electricity 1 Active
US8498917B2 Systems and methods for providing migration and performance matrices Physics 1 Active
US10629416B2 Wafer chuck and processing arrangement Electricity 1 Active
US10081533B2 Micromechanical structure and method for fabricating the same Electricity 1 Active
US9455136B2 Controlling the reflow behaviour of BPSG films and devices made thereof Electricity 1 Active
US9728480B2 Passivation layer and method of making a passivation layer Electricity 0 Active
US10858246B2 Semiconductor device, microphone and methods for forming a semiconductor device Electricity 0 Active
US9941111B2 Method for processing a semiconductor layer, method for processing a silicon substrate, and method for processing a silicon layer Electricity 0 Active
US11804415B2 Semiconductor device with first and second portions that include silicon and nitrogen Electricity 0 Active
US8150749B2 Systems and methods for general aggregation of characteristics and key figures Physics 0 Active
US10049879B2 Self aligned silicon carbide contact formation using protective layer Electricity 0 Active
US11387081B2 Wafer chuck and processing arrangement Electricity 0 Active
US11352253B2 Semiconductor device, microphone and methods for forming a semiconductor device Electricity 0 Active
US9478409B2 Method for coating a workpiece Electricity 0 Active
US9984915B2 Semiconductor wafer and method for processing a semiconductor wafer Electricity 0 Active
US10325803B2 Semiconductor wafer and method for processing a semiconductor wafer Electricity 0 Active
US11075134B2 Semiconductor device with a portion including silicon and nitrogen and method of manufacturing Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.