Patent · US Active

Semiconductor device and method of forming the same

US9524967B1 · kind B1 · utility

4Cited by
2References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 18, 2016
Grant dateDec 20, 2016
Priority date
Expiry dateFeb 18, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/85

Abstract

A semiconductor device and a method of forming the same, the semiconductor device include a substrate, and a first transistor, a second transistor and a third transistor all disposed on the substrate. The first transistor includes a first channel, and a first barrier layer and a first work function layer stacked with each other on the first channel. The second transistor includes a second channel, and a second barrier layer and a second work function layer stacked with each other. The third transistor includes a third channel and a third barrier layer and a third work function layer stacked with each other on the third channel, wherein the first barrier layer, the second barrier layer and the third barrier layer have different nitrogen ratio. The first, the second and the third transistors have different threshold voltages, respectively.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.