Charged particle beam system and method of operating a charged particle beam system
US9530611B2 · kind B2 · utility
0Cited by
22References
19Claims
0Family size
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Key dates
| Filing date | Jun 25, 2014 |
| Grant date | Dec 27, 2016 |
| Priority date | — |
| Expiry date | Sep 19, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/20235
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present disclosure relates to a charged particle beam system, comprising a noble gas field ion beam source, a charged particle beam column, and a housing defining a first vacuum region and a second vacuum region. A noble gas field ion beam source is arranged within the first vacuum region. A first mechanical vacuum pump is functionally attached to the first vacuum region, an ion getter pump is attached to the charged particle beam column, and a gas supply is attached to the first vacuum region configured to supply a noble gas to the noble gas field ion beam source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.