Patent · US Active

Systems and methods for inspecting an object

US9535014B1 · kind B1 · utility

4Cited by

1References

15Claims

0Family size

Assignee

Applied Materials Israel Ltd. · IL

Inventors

Haim Feldman · Yafia, IL
Ido Dolev · Rehovot, IL
Ido Almog · Rehovot, IL

Key dates

Filing date	Jul 15, 2015
Grant date	Jan 3, 2017
Priority date	—
Expiry date	Jul 15, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/95676
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A system, including an illumination module that comprises (a) a first traveling lens acousto-optic device; (b) a light source for illuminating the first traveling lens to provide an input beam that propagates along a first direction; (c) illumination optics for outputting an output beam that scans the object at a second direction; a detection unit; and a collection module for collecting a collected beam from the object, wherein the collected beam propagates along a third direction; and optically manipulating the collected beam to provide a counter-scan beam is directed towards the detection unit and has a focal point that is positioned at a same location regardless of the propagation of the collected beam along the third direction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.