FinFET transistor comprising portions of SiGe with a crystal orientation [111]
US9536951B2 · kind B2 · utility
1Cited by
1References
14Claims
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Key dates
| Filing date | Sep 9, 2015 |
| Grant date | Jan 3, 2017 |
| Priority date | — |
| Expiry date | Sep 9, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/6212
Abstract
FinFET transistor comprising at least:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.