Apparatus for and method of supplying target material
US9544983B2 · kind B2 · utility
1Cited by
11References
20Claims
0Family size
Assignee
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Key dates
| Filing date | Nov 5, 2014 |
| Grant date | Jan 10, 2017 |
| Priority date | — |
| Expiry date | Dec 2, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/002
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
An EUV light source target material handling system is disclosed which includes a target material dispenser and a target material repository in which solid target material in the target material repository is converted to target material in liquid form through the use of inductive heating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.