Methods of fabricating storage elements and structures having edgeless features for programmable layer(s)

US9595671B1 · kind B1 · utility

Assignee

• Adesto Technologies Corporation · US

Inventors

• Kuei-Chang Tsai · Cupertino, US
• Jeffrey A. Shields · Sunnyvale, US
• Pascal Verrier · Longuenesse, FR

Key dates

• Filing date: Jul 19, 2016
• Grant date: Mar 14, 2017
• Expiry date: Jul 19, 2036

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N70/8833

Abstract

A method can include forming a bottom structure with a top surface and a side surface that form at least one edge; forming an opening with sloped sides through at least one insulating layer to expose at least a portion of the top surface of the bottom structure; forming a programmable layer over the at least one edge, in contact with the sloped sides of the opening and the top surface of the bottom structure; and forming a top layer over the programmable layer and opening; wherein the programmable layer is programmable between at least two different impedance states.