Patent · US Active

Fully molded peripheral package on package device

US9613830B2 · kind B2 · utility

2Cited by
18References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 10, 2016
Grant dateApr 4, 2017
Priority date
Expiry dateMay 10, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3511
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method of making a semiconductor device can include providing a temporary carrier with a semiconductor die mounting site, and forming conductive interconnects over the temporary carrier in a periphery of the semiconductor die mounting site. A semiconductor die can be mounted at the semiconductor die mounting site. The conductive interconnects and semiconductor die can be encapsulated with mold compound. First ends of the conductive interconnects can be exposed. The temporary carrier can be removed to expose second ends of the conductive interconnects opposite the first ends of the conductive interconnects. The conductive interconnects can be etched to recess the second ends of the conductive interconnects with respect to the mold compound. The conductive interconnects can comprise a first portion, a second portion, and an etch stop layer disposed between the first portion and the second portion.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.