Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure

US9625368B2 · kind B2 · utility

Assignee

• NIKON CORPORATION · JP

Inventors

• Eric Peter Goodwin · Oro Valley, US
• David M. Williamson · Bethel, US
• Daniel Gene Smith · Tucson, US
• Michel Pharand · Chelmsford, US
• Alexander Cooper · Belmont, US
• Alec Paul Robertson · Sunnyvale, US
• Brian L. Stamper · Tucson, US

Key dates

• Filing date: Oct 25, 2011
• Grant date: Apr 18, 2017
• Expiry date: May 26, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01S7/4818
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.