Scanner model representation with transmission cross coefficients
US9645509B2 · kind B2 · utility
5Cited by
10References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 29, 2009 |
| Grant date | May 9, 2017 |
| Priority date | — |
| Expiry date | Oct 16, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70666
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to a method for simulating aspects of a lithographic process. According to certain aspects, the present invention uses transmission cross coefficients to represent the scanner data and models. According to other aspects, the present invention enables sensitive data regarding various scanner subsystems to be hidden from third party view, while providing data and models useful for accurate lithographic simulation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.