Patent · US Active

Method for adjusting an illumination setting

US9690203B2 · kind B2 · utility

0Cited by

2References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Joerg Zimmermann · Vancouver, CA
Ralf Stuetzle · Aalen, DE
Paul Graeupner · Aalen, DE
Olaf Conradi · Sonthofen, DE

Key dates

Filing date	Jan 6, 2015
Grant date	Jun 27, 2017
Priority date	—
Expiry date	Jul 31, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/702
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Method for setting an illumination setting in an illumination optical unit comprising at least one controllable correction device, which includes a multiplicity of adjustable correction elements for influencing the transmission, wherein the illumination setting is varied for adapting a predetermined imaging parameter in the region of an image field.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.