Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator
US9711332B2 · kind B2 · utility
14Cited by
2References
21Claims
0Family size
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Key dates
| Filing date | Apr 13, 2016 |
| Grant date | Jul 18, 2017 |
| Priority date | — |
| Expiry date | Apr 13, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32183
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Systems and methods for tuning an impedance matching network in a step-wise fashion for each state are described. By tuning the impedance matching network in a step-wise fashion for each state instead of directly achieving optimum values of a radio frequency (RF) for each state and directly achieving an optimal value of a combined variable capacitance for each state, processing of a wafer using the tuned optimal values becomes feasible.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.