Registration of CAD data with SEM images
US9715724B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 29, 2014 |
| Grant date | Jul 25, 2017 |
| Priority date | — |
| Expiry date | Sep 7, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V2201/122
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A method for image processing includes providing a microscopic image of a structure fabricated on a substrate and computer-aided design (CAD) data used in fabricating the structure. The microscopic image is processed by a computer so as to generate a first directionality map, which includes, for a matrix of points in the microscopic image, respective directionality vectors corresponding to magnitudes and directions of edges at the points irrespective of a sign of the magnitudes. The CAD data are processed by the computer so as to produce a simulated image based on the CAD data and to generate a second directionality map based on the simulated image. The first and second directionality maps are compared by the computer so as to register the microscopic image with the CAD data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.