Systems and methods for providing characteristics of an impedance matching model for use with matching networks
US9720022B2 · kind B2 · utility
19Cited by
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25Claims
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Key dates
| Filing date | May 19, 2015 |
| Grant date | Aug 1, 2017 |
| Priority date | — |
| Expiry date | Oct 1, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32935
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Systems and methods for generating and using characteristics of an impedance matching model with different impedance matching networks are described impedances and/or power efficiencies are measured using a network analyzer or a sensor. The impedances and/or power efficiencies are used to determine the characteristics. With use of different impedance matching networks, the values of the characteristics are changed to achieve same or similar results across different plasma tools for a variety of conditions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.