Charged particle optical apparatus having a selectively positionable differential pressure module

US9741528B2 · kind B2 · utility

Assignee

• Carl Zeiss Microscopy GmbH · DE

Inventors

• Michael Albiez · Aalen, DE
• Stefan Meyer · Langensendelbach, DE
• Daniel Kirsten · Wulfen, DE
• Stewart Bean · St Ives, GB
• Erik Essers · Aalen, DE

Key dates

• Filing date: May 28, 2015
• Grant date: Aug 22, 2017
• Expiry date: May 28, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/2605
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

Disclosed is a charged particle optical apparatus, which includes a particle optical arrangement, configured to define a particle beam path for inspecting an object. The object is accommodated in a pressure-controlled interior of a specimen chamber during the inspection of the object. The charged particle optical apparatus further includes a differential pressure module having a differential pressure aperture. A positioning arm is arranged in the specimen chamber for selectively position the differential pressure module within the pressure-controlled interior of the specimen chamber into an operating position in which the particle beam path passes through the differential pressure aperture. The selective positioning includes an advancing movement of the differential pressure module toward the primary particle beam path. The advancing movement is transmitted to the differential pressure module by a track-guided movement of the positioning arm.