Encapsulated microelectromechanical structure
US9758371B2 · kind B2 · utility
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224References
10Claims
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Key dates
| Filing date | Aug 19, 2016 |
| Grant date | Sep 12, 2017 |
| Priority date | — |
| Expiry date | Aug 19, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A semiconductor layer having an opening and a MEMS resonator formed in the opening is disposed between first and second substrates to encapsulate the MEMS resonator. An electrical contact that extends from the opening to an exterior of the MEMS device is formed at least in part within the semiconductor layer and at least in part within the first substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.