Quartz upper and lower domes

US9768043B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Anzhong Chang · San Jose, US
• Paul Brillhart · Pleasanton, US
• Surajit Kumar · Sunnyvale, US
• Satheesh Kuppurao · San Jose, US
• Mehmet Tugrul Samir · Mountain View, US
• David K. Carlson · San Jose, US
• Steve Aboagye · San Jose, US
• Anh N. Nguyen · Milpitas, US
• Kailash Kiran Patalay · Santa Clara, US
• Joseph M. Ranish · San Jose, US
• Oleg V. Serebryanov · San Jose, US
• Dongming Iu · Union City, US
• Shu-Kwan LAU · Sunnyvale, US
• Zuoming ZHU · Sunnyvale, US
• Herman Diniz · Fremont, US

Key dates

• Filing date: Dec 18, 2013
• Grant date: Sep 19, 2017
• Expiry date: Feb 27, 2036

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/45504
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Embodiments of the present disclosure relate to a dome assembly. The dome assembly includes an upper dome including a central window, and an upper peripheral flange engaging the central window at a circumference of the central window, wherein a tangent line on an inside surface of the central window that passes through an intersection of the central window and the upper peripheral flange is at an angle of about 8° to about 16° with respect to a planar upper surface of the peripheral flange, a lower dome comprising a lower peripheral flange and a bottom connecting the lower peripheral flange with a central opening, wherein a tangent line on an outside surface of the bottom that passes through an intersection of the bottom and the lower peripheral flange is at an angle of about 8° to about 16° with respect to a planar bottom surface of the lower peripheral flange.