System and method for controlling a temperature of a reaction assembly
US9778579B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 6, 2012 |
| Grant date | Oct 3, 2017 |
| Priority date | — |
| Expiry date | Nov 23, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/00873
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A stage assembly (10) that includes (i) a stage (14) that retains a device (26); (ii) a reaction assembly (18) that is spaced apart from the stage (14); (iii) a stage mover (16) that moves the stage (14), the stage mover (16) including a magnet array (38) that is coupled to the stage (14) and a conductor array (36) that is coupled to the reaction assembly (18); (iv) a temperature adjuster (20); and (v) a control system (22) that selectively controls the temperature adjuster (20). The conductor array (36) includes a set of first zone conductor units (250), and a set of second zone conductor units (252). The temperature adjuster (20) independently adjusts the temperature of the set of first zone conductor units (250), and the set of second zone conductor units (252).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.