Patent · US Active

Probe card assembly

US9797928B2 · kind B2 · utility

2Cited by
18References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 15, 2014
Grant dateOct 24, 2017
Priority date
Expiry dateSep 8, 2035

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/2891
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The disclosure describes a probe card assembly for nondestructive integrated circuit testing. The probe card assembly includes an outer gimbal bearing with a tapered bearing surface being mounted on a top surface of a printed circuit board. The probe card assembly further includes an inner gimbal bearing with a spherical bearing surface which contacts the tapered bearing surface of the outer gimbal bearing at a single point of contact about a circumference thereof. The probe card assembly further includes a spring plate mounted to the outer gimbal bearing, providing a downward force to a substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.