Patent · US Active

Semiconductor device contact structure having stacked nickel, copper, and tin layers

US9853006B2 · kind B2 · utility

47Cited by
5References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 24, 2016
Grant dateDec 26, 2017
Priority date
Expiry dateJun 24, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2225/06513
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A three dimensional multi-die package includes a first die and second die. The first die includes a contact attached to solder. The second die is thinned by adhesively attaching a handler to a top side of the second die and thinning a bottom side of the second die. The second die includes a multilayer contact of layered metallurgy that inhibits transfer of adhesive thereto. The layered metallurgy includes at least one layer that is wettable to the solder. The multilayer contact may include a Nickel layer, a Copper layer upon the Nickel layer, and a Nickel-Iron layer upon the Copper layer. The multilayer contact may also include a Nickel layer, a Copper-Tin layer upon the Nickel layer, and a Tin layer upon the Copper-Tin layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.