Apparatus and method for self-regulating fluid chemical delivery
US9857027B2 · kind B2 · utility
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8References
19Claims
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Key dates
| Filing date | Sep 3, 2014 |
| Grant date | Jan 2, 2018 |
| Priority date | — |
| Expiry date | Jan 16, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7306
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Methods and apparatus for chemical delivery are provided herein. In some embodiments, a first reservoir holds a first volume of fluid, receives a carrier gas, and outputs the carrier gas together with vapor derived from the first volume of fluid. A second reservoir holds a second volume of fluid and is capable of delivering a part of the second volume of fluid to the first reservoir. A self-regulating tube extends from the first reservoir to a region above the second volume of fluid in the second reservoir.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.