Martin Jeff Salinas
17Patents
4h-index
42Co-inventors
56Inventor score
Filing activity: Jan 28, 2005 → Sep 30, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8617351B2 | Plasma reactor with minimal D.C. coils for cusp, solenoid and mirror fields for plasma uniformity and device damage reduction | Electricity | 22 | Active |
| US7282675B2 | Integrated thermal unit having a shuttle with a temperature controlled surface | Emerging Cross-Sectional Technologies | 6 | Expired |
| US9976211B2 | Plasma erosion resistant thin film coating for high temperature application | Chemistry; Metallurgy | 6 | Active |
| US7297906B2 | Integrated thermal unit having a shuttle with two-axis movement | Electricity | 4 | Expired |
| US7601934B2 | Integrated thermal unit having a shuttle with a temperature controlled surface | Electricity | 4 | Active |
| US7972469B2 | Plasma processing apparatus | Electricity | 4 | Active |
| US10815562B2 | Plasma erosion resistant thin film coating for high temperature application | Chemistry; Metallurgy | 3 | Active |
| US9514933B2 | Film deposition using spatial atomic layer deposition or pulsed chemical vapor deposition | Electricity | 2 | Active |
| US7741585B2 | Integrated thermal unit having a shuttle with two-axis movement | Electricity | 2 | Active |
| US10573493B2 | Inductively coupled plasma apparatus | Electricity | 1 | Active |
| US7427728B2 | Zone control heater plate for track lithography systems | Electricity | 1 | Active |
| US11773479B2 | Plasma erosion resistant thin film coating for high temperature application | Chemistry; Metallurgy | 0 | Active |
| US9857027B2 | Apparatus and method for self-regulating fluid chemical delivery | Emerging Cross-Sectional Technologies | 0 | Active |
| US8562742B2 | Apparatus for radial delivery of gas to a chamber and methods of use thereof | Emerging Cross-Sectional Technologies | 0 | Active |
| US10010912B2 | Particle reduction via throttle gate valve purge | Emerging Cross-Sectional Technologies | 0 | Active |
| US8616224B2 | Methods and apparatus for providing a gas mixture to a pair of process chambers | Emerging Cross-Sectional Technologies | 0 | Active |
| US10468282B2 | Method and apparatus for substrate transfer and radical confinement | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.