Middle of the line (MOL) metal contacts
US9859217B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 6, 2017 |
| Grant date | Jan 2, 2018 |
| Priority date | — |
| Expiry date | Jun 6, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L23/535
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Integrated circuit (IC) structure embodiments and methods of forming them with middle of the line (MOL) contacts that incorporate a protective cap, which provides protection from damage during back end of the line (BEOL) processing. Each MOL contact has a main body in a lower portion of a contact opening. The main body has a liner (e.g., a titanium nitride layer) that lines the lower portion and a metal layer on the liner. The MOL contact also has a protective cap in an upper portion of the contact opening above the first metal layer and extending laterally over the liner to the sidewalls of the contact opening. The protective cap has an optional liner, which is different from the liner in the lower portion, and a metal layer, which is either the same or different than the metal in the main body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.