Photonic crystal sensor structure and a method for manufacturing the same

US9903816B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Jonathan Silvano de Sousa · Wien, AT
• Thomas Grille · Villach, AT
• Ursula Hedenig · Villach, AT
• Thomas Neidhart · Klagenfurt, AT
• Peter Irsigler · Ried im Innkreis, AT
• Vijaye Kumar Rajaraman · Villach, AT

Key dates

• Filing date: Dec 2, 2014
• Grant date: Feb 27, 2018
• Expiry date: Dec 2, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B2006/12166
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A sensor and methods of making a sensor are disclosed. The sensor may include a substrate, an optical source, an optical detector, a plurality of optical cavities in the substrate or in a layer structure over the substrate, where the plurality of optical cavities may be arranged in an optical path between the optical source and the optical detector, and a processing circuit coupled to the optical detector and configured to receive a signal representing an optical signal received by the optical detector.