Controlling of photo-generated charge carriers

US9905715B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Thomas Bever · Munich, DE
• Henning Feick · Dresden, DE
• Dirk Offenberg · Dresden, DE
• Stefano Parascandola · Dresden, DE
• Ines Uhlig · Dresden, DE
• Thoralf Kautzsch · Dresden, DE
• Dirk Meinhold · Dresden, DE
• Hanno Melzner · Sauerlach, DE

Key dates

• Filing date: Nov 29, 2013
• Grant date: Feb 27, 2018
• Expiry date: Nov 29, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G01S17/894
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Embodiments related to controlling of photo-generated charge carriers are described and depicted. At least one embodiment provides a semiconductor substrate comprising a photo-conversion region to convert light into photo-generated charge carriers; a region to accumulate the photo-generated charge carriers; a control electrode structure including a plurality of control electrodes to generate a potential distribution such that the photo-generated carriers are guided towards the region to accumulate the photo-generated charge carriers based on signals applied to the control electrode structure; a non-uniform doping profile in the semiconductor substrate to generate an electric field with vertical field vector components in at least a part of the photo-conversion region.