Semiconductor package structure and fabrication method thereof
US9911702B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 2, 2014 |
| Grant date | Mar 6, 2018 |
| Priority date | — |
| Expiry date | Jun 15, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/37001
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor package structure and a fabrication method thereof are provided. The fabrication method comprises: providing a substrate strip, the substrate strip comprising a plurality of substrate units; disposing a plurality of chips on the plurality of substrate units; disposing a packaging encapsulant on the substrate strip to encapsulate the chips; forming a warp-resistant layer on a top surface of the packaging encapsulant; and dividing the substrate strip to separate the plurality of substrate units to further fabricate a plurality of semiconductor package structures, wherein the warp-resistant layer is formed of a selected material with a selected thickness to make a variation of warpage of the semiconductor package structure at a temperature between 25° C. and 260° C. to be smaller than 560 μm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.