Patent · US Active

Electronic device including a HEMT with a segmented gate electrode

US9929261B2 · kind B2 · utility

0Cited by
1References
16Claims
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Assignee

Inventors

Key dates

Filing dateApr 7, 2016
Grant dateMar 27, 2018
Priority date
Expiry dateApr 7, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/693
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An electronic device can include a low-side HEMT including a segmented gate electrode; and a high-side HEMT coupled to the low-side HEMT, wherein the low-side and high voltage HEMTs are integrated within a same semiconductor die. In another aspect, an electronic device can include a source electrode; a low-side HEMT; a high-side HEMT coupled to the low-side HEMT; and a resistive element. In an embodiment, the resistive element can be coupled to the source electrode and a gate electrode of the high voltage HEMT, and in another embodiment, the resistive element can be coupled to the source electrode and a drain of the low-side HEMT. A process of forming an electronic device can include forming a channel layer over a substrate; and forming a gate electrode over the channel layer. The gate electrode can be a segmented gate electrode of a HEMT.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.