Patent · US Active

Field-effect transistor and method of making the same

US9929264B2 · kind B2 · utility

0Cited by
24References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 20, 2017
Grant dateMar 27, 2018
Priority date
Expiry dateJun 20, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/856
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device includes a semiconductor substrate, a gate structure formed over the semiconductor substrate, and an epitaxial structure formed partially within the semiconductor substrate. A vertically extending portion of the epitaxial structure extends vertically above a top surface of the semiconductor substrate in an area adjacent the gate structure. A laterally extending portion of the epitaxial structure extends laterally at an area below the top surface of the semiconductor substrate in a direction toward an area below the gate structure and beyond an area where the epitaxial structure extends vertically. The device further includes an interlayer dielectric layer between a side surface of the vertically extending portion of the epitaxial structure and a side surface of the gate structure. A top surface of the laterally extending portion of the epitaxial structure directly contacts the interlayer dielectric layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.