System and method for a capacitive thermometer
US9939331B2 · kind B2 · utility
0Cited by
7References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 21, 2014 |
| Grant date | Apr 10, 2018 |
| Priority date | — |
| Expiry date | Oct 7, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K13/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Various embodiments disclosed herein include a capacitive thermometer including a deflectable membrane and a sense electrode. The deflectable membrane is configured to adjust a capacitive value based on a temperature of the deflectable membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.