Methods and apparatus for nodule control in a titanium-tungsten target
US9960023B2 · kind B2 · utility
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16Claims
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Key dates
| Filing date | Dec 31, 2014 |
| Grant date | May 1, 2018 |
| Priority date | — |
| Expiry date | Feb 9, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC22C14/00
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Embodiments of the present disclosure include methods and apparatus for controlling titanium-tungsten (TiW) target nodule formation. In some embodiments, a target includes: a source material comprising predominantly titanium (Ti) and tungsten (W), formed from a mixture of titanium powder and tungsten powder, wherein a grain size of a predominant quantity of the titanium powder is less than or equal to a grain size of a predominant quantity of the tungsten powder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.