Electrostatic chuck with improved spacing mask and workpiece detection device
USD406852S · kind S · design
10Cited by
3References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 14, 1997 |
| Grant date | Mar 16, 1999 |
| Priority date | — |
| Expiry date | Mar 16, 2013 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.