Electrostatic chuck with improved spacing mask and workpiece detection device
USD420023S · kind S · design
11Cited by
4References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 9, 1999 |
| Grant date | Feb 1, 2000 |
| Priority date | — |
| Expiry date | Feb 1, 2014 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.