Dome assembly for a deposition chamber
USD664172S1 · kind S1 · design
1Cited by
12References
1Claims
0Family size
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Key dates
| Filing date | Nov 16, 2009 |
| Grant date | Jul 24, 2012 |
| Priority date | — |
| Expiry date | Jul 24, 2026 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.