Son T. Nguyen
46Patents
13h-index
105Co-inventors
84Inventor score
Filing activity: Apr 28, 1988 → Jun 3, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9349605B1 | Oxide etch selectivity systems and methods | Electricity | 152 | Active |
| US9499898B2 | Layered thin film heater and method of fabrication | Electricity | 129 | Active |
| US4857594A | Melt adhesive compositions | Chemistry; Metallurgy | 68 | Expired |
| US8999106B2 | Apparatus and method for controlling edge performance in an inductively coupled plasma chamber | Electricity | 41 | Active |
| US6495233B1 | Apparatus for distributing gases in a chemical vapor deposition system | Emerging Cross-Sectional Technologies | 41 | Expired |
| US7794544B2 | Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system | Emerging Cross-Sectional Technologies | 36 | Active |
| US6214095A | Adsorbent pouch for removal of gaseous contaminants | Performing Operations; Transporting | 33 | Expired |
| US7223323B2 | Multi-chemistry plating system | Electricity | 31 | Expired |
| US8137463B2 | Dual zone gas injection nozzle | Electricity | 29 | Active |
| US6300255A | Method and apparatus for processing semiconductive wafers | Chemistry; Metallurgy | 25 | Expired |
| US7775508B2 | Ampoule for liquid draw and vapor draw with a continuous level sensor | Chemistry; Metallurgy | 15 | Active |
| US9312154B2 | CVD apparatus for improved film thickness non-uniformity and particle performance | Electricity | 14 | Active |
| US7975718B2 | In-situ monitor of injection valve | Emerging Cross-Sectional Technologies | 14 | Active |
| US8004491B2 | System for and methods of storing and comparing computer generated continuous vector lines through a non-secure or a secure communication channel | Physics | 12 | Active |
| US8183132B2 | Methods for fabricating group III nitride structures with a cluster tool | Electricity | 9 | Active |
| US6506994B2 | Low profile thick film heaters in multi-slot bake chamber | Electricity | 9 | Expired |
| US7223308B2 | Apparatus to improve wafer temperature uniformity for face-up wet processing | Chemistry; Metallurgy | 9 | Expired |
| US7311810B2 | Two position anneal chamber | Electricity | 7 | Expired |
| US8481433B2 | Methods and apparatus for forming nitrogen-containing layers | Electricity | 6 | Active |
| US8137468B2 | Heated valve manifold for ampoule | Chemistry; Metallurgy | 5 | Active |
| US7311779B2 | Heating apparatus to heat wafers using water and plate with turbolators | Electricity | 5 | Expired |
| US8568529B2 | HVPE chamber hardware | Emerging Cross-Sectional Technologies | 4 | Active |
| US9117867B2 | Electrostatic chuck assembly | Emerging Cross-Sectional Technologies | 4 | Active |
| US8491720B2 | HVPE precursor source hardware | Emerging Cross-Sectional Technologies | 4 | Active |
| US8110644B2 | Bimodal pipe resin and products made therefrom | Chemistry; Metallurgy | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.