Mainframe of substrate processing system
USD992611S1 · kind S1 · design
2Cited by
19References
1Claims
0Family size
Assignee
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Key dates
| Filing date | Nov 8, 2022 |
| Grant date | Jul 18, 2023 |
| Priority date | — |
| Expiry date | Jul 18, 2038 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.