Apparatus and method for providing uniform flow of gas

USRE47440E1 · kind E1 · reissue

Assignee

• Applied Materials, Inc. · US

Inventors

• Joseph Yudovsky · Campbell, US
• Mei Chang · San Jose, US
• Faruk Gungor · San Jose, US
• Paul F. Ma · Santa Clara, US
• David Chu · Wilmington, US
• Chien-Teh Kao · Sunnyvale, US
• Hyman Lam · San Jose, US
• Dien-Yeh Wu · San Jose, US

Key dates

• Filing date: Aug 16, 2017
• Grant date: Jun 18, 2019
• Expiry date: Aug 16, 2037

Classification

• Technology area (CPC —): General

Abstract

Provided are gas distribution apparatus with a delivery channel having an inlet end, an outlet end and a plurality of apertures spaced along the length. The inlet end is connectable to an inlet gas source and the outlet end is connectable with a vacuum source. Also provided are gas distribution apparatus with spiral delivery channels, intertwined spiral delivery channels, splitting delivery channels, merging delivery channels and shaped delivery channels in which an inlet end and outlet end are configured for rapid exchange of gas within the delivery channels.