Patent assignee · US · COMPANY

Boxer Cross, INC

14Patents
0Active
14Granted
33Portfolio score

Filing activity: Apr 24, 1996 → Mar 1, 2002

Most-cited patents

PatentTitleAreaCited byStatus
US6049220A Apparatus and method for evaluating a wafer of semiconductor material Electricity 75 Expired
US6054868A Apparatus and method for measuring a property of a layer in a multilayered structure Physics 53 Expired
US6323951A Apparatus and method for determining the active dopant profile in a semiconductor wafer Physics 50 Expired
US5966019A System and method for measuring properties of a semiconductor substrate in a fabrication line Electricity 46 Expired
US5877860A System and method for measuring the microroughness of a surface of a substrate Physics 46 Expired
US6154280A System and method for measuring the microroughness of a surface of a substrate Physics 40 Expired
US5883518A System and method for measuring the doping level and doping profile of a region in a semiconductor substrate Electricity 34 Expired
US6426644B1 Apparatus and method for determining the active dopant profile in a semiconductor wafer Physics 25 Expired
US6483594B2 Apparatus and method for determining the active dopant profile in a semiconductor wafer Physics 25 Expired
US6971791B2 Identifying defects in a conductive structure of a wafer, based on heat transfer therethrough Electricity 23 Expired
US6812047B1 Evaluating a geometric or material property of a multilayered structure Electricity 21 Expired
US6911349B2 Evaluating sidewall coverage in a semiconductor wafer Physics 10 Expired
US6885444B2 Evaluating a multi-layered structure for voids Physics 8 Expired
US6812717B2 Use of a coefficient of a power curve to evaluate a semiconductor wafer Physics 6 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.