GENITECH, INC.
12Patents
3Active
12Granted
38Portfolio score
Filing activity: Jun 6, 1991 → Jun 8, 2016
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6539891B1 | Chemical deposition reactor and method of forming a thin film using the same | Chemistry; Metallurgy | 429 | Expired |
| US9029244B2 | Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus | Emerging Cross-Sectional Technologies | 398 | Active |
| US6720262B2 | Method of forming copper interconnections and thin films using chemical vapor deposition with catalyst | Electricity | 297 | Expired |
| US6623799B1 | Chemical vapor deposition method using a catalyst on a substrate surface | Chemistry; Metallurgy | 269 | Expired |
| US6645574B1 | Method of forming a thin film | Chemistry; Metallurgy | 85 | Expired |
| US5239917A | Oven | Human Necessities | 41 | Expired |
| US6380081B1 | Method of vaporizing liquid sources and apparatus therefor | Chemistry; Metallurgy | 18 | Expired |
| US6432205B1 | Gas feeding system for chemical vapor deposition reactor and method of controlling the same | Chemistry; Metallurgy | 10 | Expired |
| US6315641A | Method and apparatus for chemical mechanical polishing | Electricity | 8 | Expired |
| US6426117B1 | Method for forming a three-component nitride film containing metal and silicon | Electricity | 4 | Expired |
| US9702041B2 | Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus | Emerging Cross-Sectional Technologies | 1 | Active |
| US9406502B2 | Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.